製程檢控
產品廠牌 : Hiden Analytical 產品名稱 : XBS Triple Filter Mass Spectrometer 產品類型 : XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources 產品應用 : MBE monitoring and control. Molecular Beam Studies. Multiple beam source analysis. High Performance RGA. Desorption / Outgassing studies / Bakeout cycles. Chamber /
產品廠牌 : Hiden Analytical 產品名稱 : Hiden Ion Milling Probe – End Point Detector 產品類型 : The only dedicated end point determination tool for ion etch control and optimum process quality 產品應用 : End point Analysis. Target Impurity Determination. Quality Control / SPC. Residual Gas Analysis. Leak Detection